Inventor
CARLSON DAVID KEITH
US7 patents
⚠️ This page may combine multiple inventors who share the name “CARLSON DAVID KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7976634B2Jul 12, 2011
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems
APPLIED MATERIALS INC18 citations89
US9159554B2Oct 13, 2015
Structure and method of forming metamorphic heteroepi materials and III-V channel structures on si
APPLIED MATERIALS INC5 citations72
US9120075B2Sep 1, 2015
UV assisted polymer modification and in situ exhaust cleaning
APPLIED MATERIALS INC0 citations49