Inventor
BURROWS BRIAN HAYES
US8 patents
⚠️ This page may combine multiple inventors who share the name “BURROWS BRIAN HAYES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7976634B2Jul 12, 2011
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems
APPLIED MATERIALS INC18 citations89
US12334341B2Jun 17, 2025
Chamber body feedthrough for in chamber resistive heating element
APPLIED MATERIALS INC0 citations60
US12539526B2Feb 3, 2026
Isolation for reactor for deposition of films onto particles
APPLIED MATERIALS INC0 citations56
US12188148B2Jan 7, 2025
Multi-layer EPI chamber body
APPLIED MATERIALS INC0 citations51
US12324061B2Jun 3, 2025
Epitaxial deposition chamber
APPLIED MATERIALS INC0 citations49
US11117194B2Sep 14, 2021
Additive manufacturing having energy beam and lamp array
APPLIED MATERIALS INC0 citations49