Inventor

CAMPBELL JEFFREY RONALD

US2 patents

⚠️ This page may combine multiple inventors who share the name “CAMPBELL JEFFREY RONALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US7976634B2Jul 12, 2011

Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems

APPLIED MATERIALS INC18 citations89

CARLSON DAVID KEITH

1 patent

US8663390B2Mar 4, 2014

Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems

CARLSON DAVID KEITH12 citations78