Inventor
AZORDEGAN AMIR
US16 patents
⚠️ This page may combine multiple inventors who share the name “AZORDEGAN AMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
8 patentsUS6815675B1Nov 9, 2004
Method and system for e-beam scanning
KLA TENCOR TECH CORP19 citations92
US7423269B1Sep 9, 2008
Automated feature analysis with off-axis tilting
KLA TENCOR TECH CORP12 citations81
US7276690B1Oct 2, 2007
Method and system for e-beam scanning
KLA TENCOR TECH CORP8 citations73
US7173243B1Feb 6, 2007
Non-feature-dependent focusing
KLA TENCOR TECH CORP9 citations73
US6995369B1Feb 7, 2006
Scanning electron beam apparatus and methods of processing data from same
KLA TENCOR TECH CORP7 citations72
US7015468B1Mar 21, 2006
Methods of stabilizing measurement of ArF resist in CD-SEM
KLA TENCOR TECH CORP10 citations67
US6770879B1Aug 3, 2004
Motion picture output from electron microscope
KLA TENCOR TECH CORP10 citations65
US7405402B1Jul 29, 2008
Method and apparatus for aberration-insensitive electron beam imaging
KLA TENCOR TECH CORP0 citations48
KLA TENCOR CORP
7 patentsUS9087176B1Jul 21, 2015
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
KLA TENCOR CORP57 citations95
US10276346B1Apr 30, 2019
Particle beam inspector with independently-controllable beams
KLA TENCOR CORP9 citations84
US10545412B2Jan 28, 2020
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
KLA TENCOR CORP2 citations71
US9029810B2May 12, 2015
Using wafer geometry to improve scanner correction effectiveness for overlay control
KLA TENCOR CORP2 citations61
US9513565B2Dec 6, 2016
Using wafer geometry to improve scanner correction effectiveness for overlay control
KLA TENCOR CORP1 citations51
US9373165B2Jun 21, 2016
Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance
KLA TENCOR CORP1 citations51
US10769761B2Sep 8, 2020
Generating high resolution images from low resolution images for semiconductor applications
KLA TENCOR CORP0 citations50