Inventor
MACNAUGHTON CRAIG
US6 patents
Patents
6 patentsUS9087176B1Jul 21, 2015
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
KLA TENCOR CORP57 citations95
US10545412B2Jan 28, 2020
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
KLA TENCOR CORP2 citations71
US9518932B2Dec 13, 2016
Metrology optimized inspection
KLA TENCOR CORP2 citations61
US9029810B2May 12, 2015
Using wafer geometry to improve scanner correction effectiveness for overlay control
KLA TENCOR CORP2 citations61
US9513565B2Dec 6, 2016
Using wafer geometry to improve scanner correction effectiveness for overlay control
KLA TENCOR CORP1 citations51
US9373165B2Jun 21, 2016
Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance
KLA TENCOR CORP1 citations51