Inventor
KIM BUM JICK
US9 patents
Patents
9 patentsUS10350728B2Jul 16, 2019
System and process for in situ byproduct removal and platen cooling during CMP
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US9687960B2Jun 27, 2017
Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methods
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US9452506B2Sep 27, 2016
Vacuum cleaning systems for polishing pads, and related methods
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US11077536B2Aug 3, 2021
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC2 citations71
US10967483B2Apr 6, 2021
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC2 citations71
US11986926B2May 21, 2024
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC0 citations61
US11806835B2Nov 7, 2023
Slurry distribution device for chemical mechanical polishing
APPLIED MATERIALS INC0 citations61
US11389925B2Jul 19, 2022
Offset head-spindle for chemical mechanical polishing
APPLIED MATERIALS INC0 citations58
US12076877B2Sep 3, 2024
Polishing platens and polishing platen manufacturing methods
APPLIED MATERIALS INC0 citations48