Inventor

QUENZER JOCHEN

DE2 patents

Patents

2 patents

US10002896B2Jun 19, 2018

Housing for an infrared radiation micro device and method for fabricating such housing

REINERT WOLFGANG2 citations62

US9637377B2May 2, 2017

Method for forming a micro-surface structure and for producing a micro-electromechanical component

REINERT WOLFGANG3 citations60