Inventor
CONSTANT ANDREW J
US12 patents
Patents
12 patentsUS9281222B2Mar 8, 2016
Wafer handling systems and methods
APPLIED MATERIALS INC23 citations91
US11581203B2Feb 14, 2023
Systems for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC7 citations85
US10427303B2Oct 1, 2019
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
APPLIED MATERIALS INC17 citations84
US11232965B2Jan 25, 2022
Transport system
APPLIED MATERIALS INC9 citations83
US12159796B2Dec 3, 2024
Systems and methods for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC0 citations62
US11894251B2Feb 6, 2024
Transport system
APPLIED MATERIALS INC0 citations60
US12142508B2Nov 12, 2024
Factory interface robots usable with integrated load locks
APPLIED MATERIALS INC0 citations59
US11469124B2Oct 11, 2022
Contactless latch and coupling for vacuum wafer transfer cassette
APPLIED MATERIALS INC0 citations59
US11817332B2Nov 14, 2023
Multi-wafer volume single transfer chamber facet
APPLIED MATERIALS INC0 citations51
US11637004B2Apr 25, 2023
Alignment module with a cleaning chamber
APPLIED MATERIALS INC0 citations50
US11538706B2Dec 27, 2022
System and method for aligning a mask with a substrate
APPLIED MATERIALS INC0 citations50
US11414740B2Aug 16, 2022
Processing system for forming layers
APPLIED MATERIALS INC0 citations47