Inventor
VASUDEVA PRASHANTH
IN3 patents
Patents
3 patentsUS10619235B2Apr 14, 2020
Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber
APPLIED MATERIALS INC1 citations60
US10808310B2Oct 20, 2020
Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber
APPLIED MATERIALS INC0 citations49
US9327252B2May 3, 2016
Compact device for enhancing the mixing of gaseous species
APPLIED MATERIALS INC0 citations45