Inventor
CHEN MINFENG
TW15 patents
⚠️ This page may combine multiple inventors who share the name “CHEN MINFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS11709435B2Jul 25, 2023
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11320747B2May 3, 2022
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12265332B2Apr 1, 2025
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12399431B2Aug 26, 2025
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235589B2Feb 25, 2025
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11175597B2Nov 16, 2021
Pellicle structure for lithography mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11211374B2Dec 28, 2021
Photomask design for generating plasmonic effect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11307492B2Apr 19, 2022
Method for forming photomask and photolithography method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10845699B2Nov 24, 2020
Method for forming photomask and photolithography method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US10866525B2Dec 15, 2020
Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10685950B2Jun 16, 2020
Photomask design for generating plasmonic effect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10962885B2Mar 30, 2021
Extreme ultraviolet (EUV) polarization splitter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50