Inventor

SHIEH SHIH-YUNG

TW3 patents

Patents

3 patents

US10208378B2Feb 19, 2019

Chemical vapor deposition apparatus

HERMES EPITEK CORP1 citations57

US10844490B2Nov 24, 2020

Vapor phase film deposition apparatus

HERMES EPITEK CORP0 citations47

US10801110B2Oct 13, 2020

Gas injector for semiconductor processes and film deposition apparatus

HERMES EPITEK CORP0 citations41