Inventor
HUANG TSAN-HUA
TW14 patents
⚠️ This page may combine multiple inventors who share the name “HUANG TSAN-HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERMES EPITEK CORP
8 patentsUS10651016B2May 12, 2020
Detachable gas injector used for semiconductor equipment
HERMES EPITEK CORP1 citations60
US10418264B2Sep 17, 2019
Assembling device used for semiconductor equipment
HERMES EPITEK CORP1 citations60
US10208378B2Feb 19, 2019
Chemical vapor deposition apparatus
HERMES EPITEK CORP1 citations57
US9126214B2Sep 8, 2015
Showerhead
HERMES EPITEK CORP1 citations51
US10731253B2Aug 4, 2020
Gas injector used for semiconductor equipment
HERMES EPITEK CORP0 citations49
US8719993B2May 13, 2014
Semiconductor equipment
HERMES EPITEK CORP0 citations49
US10844490B2Nov 24, 2020
Vapor phase film deposition apparatus
HERMES EPITEK CORP0 citations47
US10927456B2Feb 23, 2021
Reaction chamber for vapor deposition apparatus
HERMES EPITEK CORP0 citations45