Inventor
KIM BOONG
KR13 patents
⚠️ This page may combine multiple inventors who share the name “KIM BOONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
8 patentsUS10197333B2Feb 5, 2019
Method and apparatus for drying substrate
SEMES CO LTD14 citations83
US9587880B2Mar 7, 2017
Apparatus and method for drying substrate
SEMES CO LTD9 citations82
US10529594B2Jan 7, 2020
Apparatus and method for treating substrate
SEMES CO LTD2 citations66
US12334370B2Jun 17, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations62
US11367635B2Jun 21, 2022
Apparatus and method for treating substrate
SEMES CO LTD0 citations62
US11735437B2Aug 22, 2023
Apparatus and method for treating substrate
SEMES CO LTD0 citations61
US9275852B2Mar 1, 2016
Substrate treating apparatus and substrate treating method
SEMES CO LTD2 citations60
US11443938B2Sep 13, 2022
Substrate processing apparatus and substrate processing method
SEMES CO LTD0 citations50