Inventor
PARK JOO JIB
KR14 patents
⚠️ This page may combine multiple inventors who share the name “PARK JOO JIB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
11 patentsUS10197333B2Feb 5, 2019
Method and apparatus for drying substrate
SEMES CO LTD14 citations83
US7316537B2Jan 8, 2008
Substrate transport apparatus
SEMES CO LTD9 citations83
US10529594B2Jan 7, 2020
Apparatus and method for treating substrate
SEMES CO LTD2 citations66
US12334370B2Jun 17, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations62
US11367635B2Jun 21, 2022
Apparatus and method for treating substrate
SEMES CO LTD0 citations62
US8007634B2Aug 30, 2011
Wafer spin chuck and an etcher using the same
SEMES CO LTD4 citations62
US11735437B2Aug 22, 2023
Apparatus and method for treating substrate
SEMES CO LTD0 citations61
US11862491B2Jan 2, 2024
Apparatus and method for treating substrate
SEMES CO LTD0 citations55
US12154796B2Nov 26, 2024
Method for treating substrate
SEMES CO LTD0 citations50
US11443938B2Sep 13, 2022
Substrate processing apparatus and substrate processing method
SEMES CO LTD0 citations50
US12318819B2Jun 3, 2025
Exhaust assembly, and liquid processing apparatus and substrate processing equipment including the same
SEMES CO LTD0 citations49