Inventor

BUONODONO JAMES

US6 patents

⚠️ This page may combine multiple inventors who share the name “BUONODONO JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US8937004B2Jan 20, 2015

Apparatus and method for controllably implanting workpieces

VARIAN SEMICONDUCTOR EQUIPMENT5 citations84

US7812325B2Oct 12, 2010

Implanting with improved uniformity and angle control on tilted wafers

VARIAN SEMICONDUCTOR EQUIPMENT4 citations62

APPLIED MATERIALS INC

2 patents

US12106936B2Oct 1, 2024

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

APPLIED MATERIALS INC2 citations72

US11715621B2Aug 1, 2023

Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions

APPLIED MATERIALS INC3 citations72

RENAU ANTHONY

1 patent

US8461030B2Jun 11, 2013

Apparatus and method for controllably implanting workpieces

RENAU ANTHONY3 citations60

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent

US9437392B2Sep 6, 2016

High-throughput ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51