Inventor

MANKALA KALYAN KUMAR

US4 patents

⚠️ This page may combine multiple inventors who share the name “MANKALA KALYAN KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

2 patents

US11656555B2May 23, 2023

Lithographic apparatus and illumination uniformity correction system

ASML HOLDING NV3 citations64

US12529963B2Jan 20, 2026

Fast uniformity drift correction

ASML HOLDING NV0 citations59

MANKALA KALYAN KUMAR

2 patents

US9136751B2Sep 15, 2015

Linear motor magnetic shield apparatus for lithographic systems

MANKALA KALYAN KUMAR0 citations41

US9130443B2Sep 8, 2015

Linear motor magnetic shield apparatus

MANKALA KALYAN KUMAR1 citations41