Inventor
SHENDRE ABHISHEK
US6 patents
Patents
6 patentsUS11756765B2Sep 12, 2023
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC2 citations71
US12243712B2Mar 4, 2025
Method and system for determining a charged particle beam exposure for a local pattern density
D2S INC0 citations60
US11886166B2Jan 30, 2024
Method and system of reducing charged particle beam write time
D2S INC0 citations60
US11604451B2Mar 14, 2023
Method and system of reducing charged particle beam write time
D2S INC0 citations60
US12572082B1Mar 10, 2026
Geometric loading effect correction for lithography
D2S INC0 citations59
US11263496B2Mar 1, 2022
Methods and systems to classify features in electronic designs
D2S INC0 citations54