Inventor
NAGASAKA HIROYUKI
JP111 patents
⚠️ This page may combine multiple inventors who share the name “NAGASAKA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
34 patentsUS7535550B2May 19, 2009
Exposure apparatus, exposure method, and method for producing device
NIKON CORP53 citations99
US7483119B2Jan 27, 2009
Exposure method, substrate stage, exposure apparatus, and device manufacturing method
NIKON CORP76 citations99
US7268854B2Sep 11, 2007
Exposure apparatus, exposure method, and method for producing device
NIKON CORP61 citations99
US7098991B2Aug 29, 2006
Exposure method, exposure apparatus, and method for manufacturing device
NIKON CORP142 citations99
US8004651B2Aug 23, 2011
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
NIKON CORP45 citations98
US7542128B2Jun 2, 2009
Exposure apparatus, exposure method, and method for producing device
NIKON CORP46 citations96
US7495744B2Feb 24, 2009
Exposure method, exposure apparatus, and method for producing device
NIKON CORP35 citations96
US7399979B2Jul 15, 2008
Exposure method, exposure apparatus, and method for producing device
NIKON CORP32 citations96
US7453550B2Nov 18, 2008
Exposure apparatus, exposure method, and method for producing device
NIKON CORP35 citations94
US7697110B2Apr 13, 2010
Exposure apparatus and device manufacturing method
NIKON CORP19 citations93
US7515246B2Apr 7, 2009
Exposure apparatus, exposure method, and method for producing device
NIKON CORP26 citations93
US7466392B2Dec 16, 2008
Exposure apparatus, exposure method, and method for producing device
NIKON CORP30 citations93
US9348239B2May 24, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP3 citations84
US7932994B2Apr 26, 2011
Exposure apparatus, exposure method, and method for producing device
NIKON CORP8 citations84
US7914972B2Mar 29, 2011
Exposure method and device manufacturing method
NIKON CORP7 citations84
US7852456B2Dec 14, 2010
Exposure apparatus, exposure method, and method for producing device
NIKON CORP12 citations84
US7714982B2May 11, 2010
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP11 citations84
US7705968B2Apr 27, 2010
Plate member, substrate holding device, exposure apparatus and method, and device manufacturing method
NIKON CORP13 citations84
US9360763B2Jun 7, 2016
Projection optical system, exposure apparatus, and exposure method
NIKON CORP4 citations83
US8054447B2Nov 8, 2011
Exposure apparatus, exposure method, method for producing device, and optical part
NIKON CORP11 citations83
US9134621B2Sep 15, 2015
Exposure apparatus, exposure method, and method for producing device
NIKON CORP3 citations74
US7932991B2Apr 26, 2011
Exposure apparatus, exposure method, and method for producing device
NIKON CORP6 citations74
US7855777B2Dec 21, 2010
Exposure apparatus and method for manufacturing device
NIKON CORP6 citations74
US7508490B2Mar 24, 2009
Exposure apparatus and device manufacturing method
NIKON CORP6 citations74
US6850313B2Feb 1, 2005
Exposure method, exposure apparatus and its making method, device manufacturing method, and device
NIKON CORP10 citations74
US9977352B2May 22, 2018
Exposure apparatus and device manufacturing method
NIKON CORP2 citations73
US9746781B2Aug 29, 2017
Exposure apparatus and method for producing device
NIKON CORP2 citations73
US9310696B2Apr 12, 2016
Projection optical system, exposure apparatus, and exposure method
NIKON CORP3 citations72
US11387074B2Jul 12, 2022
Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method
NIKON CORP0 citations63
US10984982B2Apr 20, 2021
Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method
NIKON CORP0 citations63
US9778580B2Oct 3, 2017
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations63
US9529273B2Dec 27, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP2 citations63
US9285684B2Mar 15, 2016
Exposure method, exposure apparatus, and method for producing device
NIKON CORP1 citations63
US9097988B2Aug 4, 2015
Exposure apparatus and device manufacturing method
NIKON CORP2 citations63
NAGASAKA HIROYUKI
8 patentsUS8891059B2Nov 18, 2014
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
NAGASAKA HIROYUKI30 citations93
US8717533B2May 6, 2014
Exposure apparatus, exposure method, and method for producing device
NAGASAKA HIROYUKI11 citations84
US8064044B2Nov 22, 2011
Exposure apparatus, exposure method, and device producing method
NAGASAKA HIROYUKI10 citations84
US8218127B2Jul 10, 2012
Exposure apparatus and device manufacturing method
NAGASAKA HIROYUKI4 citations74
US8698998B2Apr 15, 2014
Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device
NAGASAKA HIROYUKI4 citations73
US8721803B2May 13, 2014
Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating method
NAGASAKA HIROYUKI4 citations72
US9588436B2Mar 7, 2017
Exposure apparatus, exposure method, and device producing method
NAGASAKA HIROYUKI1 citations63
US8736809B2May 27, 2014
Exposure apparatus, exposure method, and method for producing device
NAGASAKA HIROYUKI0 citations63
NISHII YASUFUMI
2 patentsUS9013675B2Apr 21, 2015
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
NISHII YASUFUMI32 citations94
US8134685B2Mar 13, 2012
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method
NISHII YASUFUMI43 citations94
SAMSUNG ELECTRONICS CO LTD
2 patentsOMURA YASUHIRO
1 patentNIKON CORPROATION
1 patentKENWOOD CORP
1 patentKIDA YOSHIKI
1 patentShowing the top 50 of 111 patents by PatentIndex Score.