Inventor
OCHIAI AKIHIKO
JP11 patents
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SONY CORP
10 patentsUS6043526AMar 28, 2000
Semiconductor memory cell using a ferroelectric thin film and a method for fabricating it
SONY CORP137 citations97
US6407422B1Jun 18, 2002
Oxygen diffusion blocking semiconductor capacitor
SONY CORP86 citations96
US5378919AJan 3, 1995
Semiconductor integrated circuit device with plural gates and plural passive devices
SONY CORP78 citations95
US6410397B1Jun 25, 2002
Method for manufacturing a dielectric trench capacitor with a stacked-layer structure
SONY CORP39 citations92
US6355952B1Mar 12, 2002
Capacitor having ferroelectric film and multiple layers of insulating and protective films for nonvolatile memory cell
SONY CORP36 citations92
US6215646B1Apr 10, 2001
Dielectric capacitor and method of manufacturing same, and dielectric memory using same
SONY CORP32 citations92
US6090657AJul 18, 2000
Method of manufacturing capacitor having ferroelectric film for nonvolatile memory cell
SONY CORP20 citations92
US5998825ADec 7, 1999
Capacitor structure of semiconductor memory cell and method for fabricating capacitor structure of semiconductor memory cell
SONY CORP22 citations92
US5589419ADec 31, 1996
Process for fabricating semiconductor device having a multilevel interconnection
SONY CORP13 citations73
US5943583AAug 24, 1999
Method for manufacturing semiconductor device
SONY CORP3 citations62