P

Inventor

NORTON ADAM

US12 patents
⚠️ This page may combine multiple inventors who share the name “NORTON ADAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents
US7961306B2Jun 14, 2011

Optimizing sensitivity of optical metrology measurements

TOKYO ELECTRON LTD9 citations84
US7660696B1Feb 9, 2010

Apparatus for auto focusing a workpiece using two or more focus parameters

TOKYO ELECTRON LTD15 citations84
US8030631B2Oct 4, 2011

Apparatus for controlling angle of incidence of multiple illumination beams

TOKYO ELECTRON LTD5 citations62
US7924422B2Apr 12, 2011

Calibration method for optical metrology

TOKYO ELECTRON LTD5 citations60

KLA TENCOR CORP

2 patents
US6611330B2Aug 26, 2003

System for measuring polarimetric spectrum and other properties of a sample

KLA TENCOR CORP120 citations99
US6184984B1Feb 6, 2001

System for measuring polarimetric spectrum and other properties of a sample

KLA TENCOR CORP145 citations99

THERMA WAVE INC

2 patents
US6870617B2Mar 22, 2005

Accurate small-spot spectrometry systems and methods

THERMA WAVE INC2 citations62
US6738136B2May 18, 2004

Accurate small-spot spectrometry instrument

THERMA WAVE INC2 citations62

BODKIN ANDREW

1 patent
US8233148B2Jul 31, 2012

Hyperspectral imaging systems

BODKIN ANDREW38 citations90

KLEIN ERIC A

1 patent
US8917459B2Dec 23, 2014

Ergonomic vertical vision redirection

KLEIN ERIC A9 citations81

TOKYO ELECTRON LIMTED

1 patent
US8030632B2Oct 4, 2011

Controlling angle of incidence of multiple-beam optical metrology tools

TOKYO ELECTRON LIMTED5 citations61

NORTON ADAM

1 patent
US8107073B2Jan 31, 2012

Diffraction order sorting filter for optical metrology

NORTON ADAM2 citations54