P

Inventor

XU YIPING

US8 patents
⚠️ This page may combine multiple inventors who share the name “XU YIPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US6590656B2Jul 8, 2003

Spectroscopic scatterometer system

KLA TENCOR CORP172 citations98
US7859659B2Dec 28, 2010

Spectroscopic scatterometer system

KLA TENCOR CORP19 citations88
US7898661B2Mar 1, 2011

Spectroscopic scatterometer system

KLA TENCOR CORP6 citations69

KLA TENCOR TECH CORP

2 patents
US6483580B1Nov 19, 2002

Spectroscopic scatterometer system

KLA TENCOR TECH CORP263 citations98
US7173699B2Feb 6, 2007

Spectroscopic scatterometer system

KLA TENCOR TECH CORP20 citations92

WYKO CORP

2 patents
US5555471ASep 10, 1996

Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry

WYKO CORP116 citations92
US5321497AJun 14, 1994

Interferometric integration technique and apparatus to confine 2π discontinuity

WYKO CORP18 citations73

GEN ELECTRIC

1 patent
US6358014B1Mar 19, 2002

Composite spinner and method of making the same

GEN ELECTRIC68 citations94