Inventor
CLARK WILLIAM R
US15 patents
⚠️ This page may combine multiple inventors who share the name “CLARK WILLIAM R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
8 patentsUS7615120B2Nov 10, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC64 citations95
US7706925B2Apr 27, 2010
Integrated pressure and flow ratio control system
MKS INSTR INC23 citations92
US7628861B2Dec 8, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC37 citations92
US6932098B2Aug 23, 2005
Apparatus and method for pressure fluctuation insensitive mass flow control
MKS INSTR INC33 citations92
US7829353B2Nov 9, 2010
Pulsed mass flow delivery system and method
MKS INSTR INC18 citations90
US7628860B2Dec 8, 2009
Pulsed mass flow delivery system and method
MKS INSTR INC29 citations90
US6418954B1Jul 16, 2002
System and method for dividing flow
MKS INSTR INC71 citations89
US4327894AMay 4, 1982
Linearized controlled valves
MKS INSTR INC19 citations73