Inventor
CHOI SUNG-JE
KR5 patents
Patents
5 patentsUS6576053B1Jun 10, 2003
Method of forming thin film using atomic layer deposition method
SAMSUNG ELECTRONICS CO LTD297 citations98
US6509280B2Jan 21, 2003
Method for forming a dielectric layer of a semiconductor device
SAMSUNG ELECTRONICS CO LTD215 citations96
US6583056B2Jun 24, 2003
Storage electrode of a semiconductor memory device and method for fabricating the same
SAMSUNG ELECTRONICS CO LTD19 citations90
US6930013B2Aug 16, 2005
Method of forming a capacitor of an integrated circuit device
SAMSUNG ELECTRONICS CO LTD19 citations83
US6809363B2Oct 26, 2004
Storage electrode of a semiconductor memory device
SAMSUNG ELECTRONICS CO LTD9 citations71