Inventor
CHHEDA SEJAL N
US4 patents
Patents
4 patentsUS6611045B2Aug 26, 2003
Method of forming an integrated circuit device using dummy features and structure thereof
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US6459156B1Oct 1, 2002
Semiconductor device, a process for a semiconductor device, and a process for making a masking database
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US6489083B1Dec 3, 2002
Selective sizing of features to compensate for resist thickness variations in semiconductor devices
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US6614062B2Sep 2, 2003
Semiconductor tiling structure and method of formation
MOTOROLA INC12 citations72