Inventor
ELLINGBOE SUSAN
US4 patents
Patents
4 patentsUS6696366B1Feb 24, 2004
Technique for etching a low capacitance dielectric layer
LAM RES CORP86 citations95
US6383931B1May 7, 2002
Convertible hot edge ring to improve low-K dielectric etch
LAM RES CORP59 citations94
US6114250ASep 5, 2000
Techniques for etching a low capacitance dielectric layer on a substrate
LAM RES CORP61 citations94
US6653734B2Nov 25, 2003
Convertible hot edge ring to improve low-K dielectric etch
LAM RES CORP31 citations90