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Inventor
JANOWIAK CHRISTINE
US
2 patents
Patents
2 patents
US6383931B1
May 7, 2002
Convertible hot edge ring to improve low-K dielectric etch
LAM RES CORP
59 citations
94
US6653734B2
Nov 25, 2003
Convertible hot edge ring to improve low-K dielectric etch
LAM RES CORP
31 citations
90