Inventor
MOREY IAN J
US8 patents
⚠️ This page may combine multiple inventors who share the name “MOREY IAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6696366B1Feb 24, 2004
Technique for etching a low capacitance dielectric layer
LAM RES CORP86 citations95
US6383931B1May 7, 2002
Convertible hot edge ring to improve low-K dielectric etch
LAM RES CORP59 citations94
US6114250ASep 5, 2000
Techniques for etching a low capacitance dielectric layer on a substrate
LAM RES CORP61 citations94
US6777344B2Aug 17, 2004
Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications
LAM RES CORP25 citations91
US6165910ADec 26, 2000
Self-aligned contacts for semiconductor device
LAM RES CORP20 citations91
US6653734B2Nov 25, 2003
Convertible hot edge ring to improve low-K dielectric etch
LAM RES CORP31 citations90
US6841483B2Jan 11, 2005
Unique process chemistry for etching organic low-k materials
LAM RES CORP19 citations89