Inventor
HILLARD ROBERT J
US11 patents
Patents
11 patentsUS6492827B1Dec 10, 2002
Non-invasive electrical measurement of semiconductor wafers
SOLID STATE MEASUREMENTS INC60 citations95
US7023231B2Apr 4, 2006
Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof
SOLID STATE MEASUREMENTS INC112 citations93
US5023561AJun 11, 1991
Apparatus and method for non-invasive measurement of electrical properties of a dielectric layer in a semiconductor wafer
SOLID STATE MEASUREMENTS INC49 citations91
US6741093B2May 25, 2004
Method of determining one or more properties of a semiconductor wafer
SOLID STATE MEASUREMENTS INC15 citations83
US6991948B2Jan 31, 2006
Method of electrical characterization of a silicon-on-insulator (SOI) wafer
SOLID STATE MEASUREMENTS INC9 citations72
US6150832ANov 21, 2000
Noncontact capacitance measuring device
SOLID STATE MEASUREMENTS INC12 citations72
US7327155B2Feb 5, 2008
Elastic metal gate MOS transistor for surface mobility measurement in semiconductor materials
SOLID STATE MEASUREMENTS INC3 citations61
US7005307B2Feb 28, 2006
Apparatus and method for detecting soft breakdown of a dielectric layer of a semiconductor wafer
SOLID STATE MEASUREMENTS INC3 citations61
US6879176B1Apr 12, 2005
Conductance-voltage (GV) based method for determining leakage current in dielectrics
SOLID STATE MEASUREMENTS INC4 citations61
US7295022B2Nov 13, 2007
Method and system for automatically determining electrical properties of a semiconductor wafer or sample
SOLID STATE MEASUREMENTS INC4 citations53
US7037734B2May 2, 2006
Method and apparatus for determining generation lifetime of product semiconductor wafers
SOLID STATE MEASUREMENTS INC1 citations51