Inventor
SAIGUSA HIDEHITO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SAIGUSA HIDEHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7166200B2Jan 23, 2007
Method and apparatus for an improved upper electrode plate in a plasma processing system
TOKYO ELECTRON LTD49 citations96
US7163585B2Jan 16, 2007
Method and apparatus for an improved optical window deposition shield in a plasma processing system
TOKYO ELECTRON LTD56 citations96
US6798519B2Sep 28, 2004
Method and apparatus for an improved optical window deposition shield in a plasma processing system
TOKYO ELECTRON LTD44 citations96
US7811428B2Oct 12, 2010
Method and apparatus for an improved optical window deposition shield in a plasma processing system
TOKYO ELECTRON LTD14 citations92
US7204912B2Apr 17, 2007
Method and apparatus for an improved bellows shield in a plasma processing system
TOKYO ELECTRON LTD23 citations92
US7166166B2Jan 23, 2007
Method and apparatus for an improved baffle plate in a plasma processing system
TOKYO ELECTRON LTD40 citations92
US7137353B2Nov 21, 2006
Method and apparatus for an improved deposition shield in a plasma processing system
TOKYO ELECTRON LTD32 citations92
US7678226B2Mar 16, 2010
Method and apparatus for an improved bellows shield in a plasma processing system
TOKYO ELECTRON LTD15 citations84
US7566368B2Jul 28, 2009
Method and apparatus for an improved upper electrode plate in a plasma processing system
TOKYO ELECTRON LTD13 citations84