Inventor
NEERHOF HENDRIK ANTONY JOHANNE
NL7 patents
Patents
7 patentsUS7187433B2Mar 6, 2007
Electrostatic clamp assembly for a lithographic apparatus
ASML NETHERLANDS BV18 citations91
US7041989B1May 9, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7245357B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations68
US7361911B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7110090B2Sep 19, 2006
Lithographic apparatus and method to detect correct clamping of an object
ASML NETHERLANDS BV2 citations59
US7119346B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7375353B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations39