Inventor
KUIPERS LEO WILHELMUS MARIA
NL4 patents
⚠️ This page may combine multiple inventors who share the name “KUIPERS LEO WILHELMUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7394520B2Jul 1, 2008
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
ASML NETHERLANDS BV10 citations79
US7245357B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations68
US7384228B2Jun 10, 2008
Insertion device, lithographic apparatus with said insertion device and device manufacturing method
ASML NETHERLANDS BV4 citations58