Inventor
SU SIAW SUIAN SABRINA
SG2 patents
Patents
2 patentsUS7244674B2Jul 17, 2007
Process of forming a composite diffusion barrier in copper/organic low-k damascene technology
AGENCY SCIENCE TECH & RES10 citations79
US7335990B2Feb 26, 2008
Process of forming a composite diffusion barrier in copper/organic low-k damascene technology
AGENCY SCIENCE TECH & RES3 citations57