Inventor

VAN DE KERKHOF MARCUS ADRIANUS

NL103 patents

⚠️ This page may combine multiple inventors who share the name “VAN DE KERKHOF MARCUS ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN DE KERKHOF MARCUS ADRIANUS

ASML NETHERLANDS BV

Lithographic apparatus and device manufacturing method

Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Radiation analysis system

Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus

Apodization measurement for lithographic apparatus

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method with improved contaminant particle capture

Projection system and mirror and radiation source for a lithographic apparatus

Projection system and mirror and radiation source for a lithographic apparatus

Projection system and minor and radiation source for a lithographic apparatus

Lithographic apparatus and device manufacturing method

Membrane for EUV lithography

Lithographic apparatus for measuring overlay error and a device manufacturing method

Lithographic focus and dose measurement using a 2-D target

Membrane for EUV lithography

Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus

Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus

Lithographic apparatus

Cleaning apparatus and methods of cleaning

Inspection apparatus to detect a target located within a pattern for lithography

Inspection apparatus to detect a target located within a pattern for lithography

Device manufacturing method and lithographic apparatus

Lithographic apparatus, lens interferometer and device manufacturing method

Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device

Apodization measurement for lithographic apparatus

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Lithographic apparatus and device manufacturing method

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

VAN DE KERKHOF MARCUS ADRIANUS

Inspection apparatus for lithography

Apparatus and method of measuring a property of a substrate

Lithographic apparatus, control system and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Inspection apparatus to detect a target located within a pattern for lithography

LOF JOERI

Lithographic apparatus and device manufacturing method

DEN BOEF ARIE JEFFREY

Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus

SENGERS TIMOTHEUS FRANCISCUS

Lithographic apparatus and device manufacturing method

LEEWIS CHRISTIAN MARINUS

Lithographic focus and dose measurement using a 2-D target

ASML NETHERLANDS N V

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus

VAN DER SCHAAR MAURITS

Sub-wavelength segmentation in measurement targets on substrates

STAALS FRANK

Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate

DZIOMKINA NINA VLADIMIROVNA

Lithographic apparatus, removable member and device manufacturing method

DE GRAAF ROELOF FREDERIK

Lithographic apparatus, removable member and device manufacturing method

CORBEIJ WILHELMUS MARIA

Lithographic apparatus and device manufacturing method