Inventor
MOEST BEARRACH
NL28 patents
⚠️ This page may combine multiple inventors who share the name “MOEST BEARRACH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
17 patentsUS7586108B2Sep 8, 2009
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
ASML NETHERLANDS BV56 citations94
US7675605B2Mar 9, 2010
Device and method for transmission image sensing
ASML NETHERLANDS BV9 citations83
US7525638B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations81
US7282701B2Oct 16, 2007
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV12 citations81
US7453078B2Nov 18, 2008
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV8 citations71
US7655367B2Feb 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US7583359B2Sep 1, 2009
Reduction of fit error due to non-uniform sample distribution
ASML NETHERLANDS BV4 citations62
US11599027B2Mar 7, 2023
Lithographic process and apparatus and inspection process and apparatus
ASML NETHERLANDS BV0 citations58
US11199782B2Dec 14, 2021
Lithographic process and apparatus and inspection process and apparatus
ASML NETHERLANDS BV0 citations58
US11644755B2May 9, 2023
Lithographic method
ASML NETHERLANDS BV0 citations55
US7145630B2Dec 5, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10705438B2Jul 7, 2020
Lithographic method
ASML NETHERLANDS BV0 citations48
US10571814B2Feb 25, 2020
Lithographic method
ASML NETHERLANDS BV0 citations48
US9658541B2May 23, 2017
Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate
ASML NETHERLANDS BV0 citations48
US12443115B2Oct 14, 2025
Measurement system and method for characterizing a patterning device
ASML NETHERLANDS BV0 citations47
US11237490B2Feb 1, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations44
US9857694B2Jan 2, 2018
Estimating deformation of a patterning device and/or a change in its position
ASML NETHERLANDS BV0 citations39
VAN DE KERKHOF MARCUS ADRIANUS
3 patentsUS8773637B2Jul 8, 2014
Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark
VAN DE KERKHOF MARCUS ADRIANUS2 citations58
US8629418B2Jan 14, 2014
Lithographic apparatus and sensor therefor
VAN DE KERKHOF MARCUS ADRIANUS0 citations46
US8896817B2Nov 25, 2014
Lithographic projection apparatus, device manufacturing methods and mask with sensor and diffuser for use in a device manufacturing method
VAN DE KERKHOF MARCUS ADRIANUS0 citations41
NIHTIANOV STOYAN
2 patentsUS8138485B2Mar 20, 2012
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN35 citations86
US8426831B2Apr 23, 2013
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
NIHTIANOV STOYAN6 citations78
STAALS FRANK
2 patentsUS9329500B2May 3, 2016
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor
STAALS FRANK0 citations51
US8975599B2Mar 10, 2015
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
STAALS FRANK1 citations51