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Inventor
BOMHOF CEDRAN
NL
2 patents
⚠️ This page may combine multiple inventors who share the name “BOMHOF CEDRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VAN DE KERKHOF MARCUS ADRIANUS
1 patent
US8773637B2
Jul 8, 2014
Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark
VAN DE KERKHOF MARCUS ADRIANUS
2 citations
58
ASML NETHERLANDS BV
1 patent
US9658541B2
May 23, 2017
Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate
ASML NETHERLANDS BV
0 citations
48