Inventor
PAPE ERIC
US13 patents
⚠️ This page may combine multiple inventors who share the name “PAPE ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS8358416B2Jan 22, 2013
Methods and apparatus for normalizing optical emission spectra
LAM RES CORP11 citations83
US7884925B2Feb 8, 2011
Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
LAM RES CORP9 citations83
US8852964B2Oct 7, 2014
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP14 citations82
US9012243B2Apr 21, 2015
Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
LAM RES CORP4 citations71
US7952694B2May 31, 2011
Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
LAM RES CORP3 citations62
US10306776B1May 28, 2019
Substrate processing system printed-circuit control board assembly with one or more heater layers
LAM RES CORP1 citations59
US10978323B2Apr 13, 2021
Substrate holder having integrated temperature measurement electrical devices
LAM RES CORP0 citations57
US10186437B2Jan 22, 2019
Substrate holder having integrated temperature measurement electrical devices
LAM RES CORP1 citations57
US12060636B2Aug 13, 2024
Method for conditioning a plasma processing chamber
LAM RES CORP0 citations41