Inventor

OKUYAMA KIKUO

JP13 patents

⚠️ This page may combine multiple inventors who share the name “OKUYAMA KIKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

4 patents

US6205676B1Mar 27, 2001

Method and apparatus for removing particles from surface of article

EBARA CORP38 citations95

US6391118B2May 21, 2002

Method for removing particles from surface of article

EBARA CORP21 citations92

US6240931B1Jun 5, 2001

Method for removing particles from a surface of an article

EBARA CORP10 citations73

US6461692B2Oct 8, 2002

Chemical vapor deposition method and chemical vapor deposition apparatus

EBARA CORP7 citations71

TOKYO ELECTRON LTD

2 patents

US7347006B2Mar 25, 2008

Processing apparatus and method for removing particles therefrom

TOKYO ELECTRON LTD9 citations83

US7748138B2Jul 6, 2010

Particle removal method for a substrate transfer mechanism and apparatus

TOKYO ELECTRON LTD5 citations62

OKUYAMA KIKUO

2 patents

US8652358B2Feb 18, 2014

Aluminum oxide phosphor and method for producing the same

OKUYAMA KIKUO3 citations55

US8668843B2Mar 11, 2014

M-C-N-O based phosphor

OKUYAMA KIKUO0 citations40

SHIMADZU CORP

1 patent

US6674528B2Jan 6, 2004

Method and apparatus for measuring suspended particulate matter

SHIMADZU CORP26 citations88

KASEI OPTONIX

1 patent

US6712993B2Mar 30, 2004

Phosphor and its production process

KASEI OPTONIX28 citations87

RIKEN

1 patent

US6892142B2May 10, 2005

Method of analyzing particles suspended in liquid and liquid-suspended particle analyzer for carrying out the method

RIKEN8 citations68

KANOMAX JAPAN INC

1 patent

US7522703B2Apr 21, 2009

Aerosol particle charging device

KANOMAX JAPAN INC5 citations55

TAKAI JUN

1 patent

US8562865B2Oct 22, 2013

Method of producing M-C-N-O based phosphor

TAKAI JUN0 citations44