Inventor

SUGIE NORIHIKO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “SUGIE NORIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

3 patents

US8697344B2Apr 15, 2014

Composition for forming upper layer film for immersion exposure, upper layer film for immersion exposure, and method of forming photoresist pattern

JSR CORP2 citations60

US12104087B2Oct 1, 2024

Composition for chemical-mechanical polishing and chemical-mechanical polishing method

JSR CORP0 citations55

US8980529B2Mar 17, 2015

Radiation-sensitive resin composition, polymer, and resist pattern-forming method

JSR CORP1 citations47

NISHIMURA YUKIO

1 patent

US8895229B2Nov 25, 2014

Composition for formation of upper layer film, and method for formation of photoresist pattern

NISHIMURA YUKIO1 citations46

KOUNO DAITA

1 patent

US8431332B2Apr 30, 2013

Composition for forming upper layer film for immersion exposure, upper layer film for immersion exposure, and method of forming photoresist pattern

KOUNO DAITA1 citations45

NATSUME NORIHIRO

1 patent

US8497062B2Jul 30, 2013

Resin for formation of upper antireflective film, composition for formation of upper antireflective film, and resist pattern formation method

NATSUME NORIHIRO1 citations43

KUSABIRAKI KAZUNORI

1 patent

US8501389B2Aug 6, 2013

Upper layer-forming composition and resist patterning method

KUSABIRAKI KAZUNORI0 citations31