Inventor

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS

NL64 patents

⚠️ This page may combine multiple inventors who share the name “VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS

ASML NETHERLANDS BV

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method

Stage system and a lithographic apparatus

Pellicle and pellicle assembly

Membrane for EUV lithography

Method for manufacturing a membrane assembly

Substrate table and lithographic apparatus

Object table, a stage apparatus and a lithographic apparatus

Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle

Lithographic apparatus, and patterning device for use in a lithographic process

Pellicle and pellicle assembly

Height sensor, lithographic apparatus and method for manufacturing devices

Pellicle and pellicle assembly

Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless

Imprint lithography

Membrane for EUV lithography

Membrane for EUV lithography

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Measurement substrate and a measurement method

Vibration isolation system and lithographic apparatus

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Assembly comprising a cryostat and layer of superconducting coils and motor system provided with such an assembly

Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method

Positioning device, magnetic support system and lithographic apparatus

Thermo-mechanical actuator

Actuator unit for positioning an optical element

Multi-stage system, a control method therefor, and a lithographic apparatus

Multi-stage system, a control method therefor, and a lithographic apparatus

Multi-stage system, a control method therefor, and a lithographic apparatus

Lithographic apparatus stage coupling

BUTLER HANS

Imprint lithographic apparatus and imprint lithographic method

Lithographic apparatus comprising a substrate table and a surface substrate actuator

Multi-stage system, a control method therefor, and a lithographic apparatus

VAN EIJK JAN

Positioning system, lithographic apparatus and method

Lithographic apparatus, and patterning device for use in a lithographic process

System for detecting motion, lithographic apparatus and device manufacturing method

ASML HOLDING NV

Lithographic apparatus and method

Lithographic apparatus and method

KONINKLIJKE PHILIPS NV

X-ray imaging arrangement

X-ray imaging arrangement

HOL SVEN ANTOIN JOHAN

Positioning system and a method for positioning a substage with respect to a frame

Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method

KRUIJT-STEGEMAN YVONNE WENDELA

Imprint lithography method

LAFARRE RAYMOND WILHELMUS LOUIS

Positioning device, lithographic apparatus, positioning method and device manufacturing method

DEN BOEF ARIE JEFFREY

Imprint lithography

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS

Lithographic apparatus and method

HUANG YANG-SHAN

Lithographic apparatus, method of deforming a substrate table and device manufacturing method

CADEE THEODORUS PETRUS MARIA

Actuator