Inventor
BAUMGART PETER
US12 patents
⚠️ This page may combine multiple inventors who share the name “BAUMGART PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS9392678B2Jul 12, 2016
Target material supply apparatus for an extreme ultraviolet light source
ASML NETHERLANDS BV5 citations83
US9632418B2Apr 25, 2017
Target material supply apparatus for an extreme ultraviolet light source
ASML NETHERLANDS BV2 citations72
US9699876B2Jul 4, 2017
Method of and apparatus for supply and recovery of target material
ASML NETHERLANDS BV3 citations62
US11317501B2Apr 26, 2022
Method of purifying target material for an EUV light source
ASML NETHERLANDS BV0 citations55
US9544983B2Jan 10, 2017
Apparatus for and method of supplying target material
ASML NETHERLANDS BV1 citations51
US10455680B2Oct 22, 2019
Method and apparatus for purifying target material for EUV light source
ASML NETHERLANDS BV0 citations45