Inventor
HODGES JORDAN
US5 patents
⚠️ This page may combine multiple inventors who share the name “HODGES JORDAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
4 patentsUS10385452B2Aug 20, 2019
Source reagent-based delivery of fluid with high material flux for batch deposition
ENTEGRIS INC11 citations80
US9695985B2Jul 4, 2017
Fluid delivery system and method
ENTEGRIS INC5 citations80
US11104993B2Aug 31, 2021
Modular tray ampoule
ENTEGRIS INC2 citations70
US10495259B2Dec 3, 2019
Fluid delivery system and method
ENTEGRIS INC0 citations48