Inventor

CROMBAG ERIK MATHIJS MARIA

NL2 patents

Patents

2 patents

US9971478B2May 15, 2018

Method and apparatus for inspection and metrology

ASML NETHERLANDS BV3 citations63

US11372338B2Jun 28, 2022

Method for evaluating control strategies in a semiconductor manufacturing process

ASML NETHERLANDS BV1 citations49