Inventor
Muthukamatchi Karuppasamy
IN15 patents
Patents
15 patentsUS11355367B2Jun 7, 2022
Robot for simultaneous substrate transfer
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US10500719B2Dec 10, 2019
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
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US11358809B1Jun 14, 2022
Vacuum robot apparatus for variable pitch access
APPLIED MATERIALS INC6 citations74
US11443973B2Sep 13, 2022
Robot for simultaneous substrate transfer
APPLIED MATERIALS INC3 citations72
US10850390B2Dec 1, 2020
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
APPLIED MATERIALS INC4 citations72
US10814475B2Oct 27, 2020
Dual robot including spaced upper arms and interleaved wrists and systems and methods including same
APPLIED MATERIALS INC3 citations72
US11211269B2Dec 28, 2021
Multi-object capable loadlock system
APPLIED MATERIALS INC3 citations68
US12076859B2Sep 3, 2024
Infinite rotation of vacuum robot linkage through timing belt with isolated environment
APPLIED MATERIALS INC3 citations65
US11244846B2Feb 8, 2022
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC1 citations62
US10943805B2Mar 9, 2021
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC1 citations62
US12170220B2Dec 17, 2024
Robot for simultaneous substrate transfer
APPLIED MATERIALS INC0 citations61
USD1107089SDec 23, 2025
Substrate-handling robot end effector
APPLIED MATERIALS INC0 citations60
US12528207B2Jan 20, 2026
Carrier with rotation prevention feature
APPLIED MATERIALS INC0 citations55
US12255089B2Mar 18, 2025
Robot apparatus, systems, and methods for transporting substrates in electronic device manufacturing
APPLIED MATERIALS INC0 citations51
US11850742B2Dec 26, 2023
Dual robot including splayed end effectors and systems and methods including same
APPLIED MATERIALS INC0 citations51