Inventor

MICHITA NORIAKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “MICHITA NORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

3 patents

US11018033B2May 25, 2021

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP1 citations61

US11264253B2Mar 1, 2022

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations49

US10804110B2Oct 13, 2020

Substrate processing apparatus, method of manufacturing semiconductor device and non-transistory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations48

HITACHI INT ELECTRIC INC

1 patent

US10381241B2Aug 13, 2019

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations38

HARADA KOICHIRO

1 patent

US9748132B2Aug 29, 2017

Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substrates

HARADA KOICHIRO0 citations33