Inventor
OGATA SHINICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OGATA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OGATA SHINICHI
3 patentsUS8932952B2Jan 13, 2015
Method for polishing silicon wafer and polishing liquid therefor
OGATA SHINICHI6 citations68
US8728942B2May 20, 2014
Method for producing epitaxial silicon wafer
OGATA SHINICHI3 citations57
US9707659B2Jul 18, 2017
Method and apparatus for polishing workpiece
OGATA SHINICHI0 citations48