Inventor

TANIMOTO RYUICHI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “TANIMOTO RYUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMCO CORP

4 patents

US11559869B2Jan 24, 2023

Wafer edge polishing apparatus and method

SUMCO CORP3 citations65

US10710209B2Jul 14, 2020

Wafer polishing apparatus and polishing head used for same

SUMCO CORP2 citations64

US11075085B2Jul 27, 2021

Wafer polishing method

SUMCO CORP0 citations59

US11170988B2Nov 9, 2021

Method of double-side polishing silicon wafer

SUMCO CORP0 citations48

OGATA SHINICHI

2 patents

US8932952B2Jan 13, 2015

Method for polishing silicon wafer and polishing liquid therefor

OGATA SHINICHI6 citations68

US9707659B2Jul 18, 2017

Method and apparatus for polishing workpiece

OGATA SHINICHI0 citations48

MATSUDA SHUHEI

1 patent

US8877643B2Nov 4, 2014

Method of polishing a silicon wafer

MATSUDA SHUHEI2 citations56

KATOH TAKEO

1 patent

US8147295B2Apr 3, 2012

Method of polishing silicon wafer

KATOH TAKEO4 citations54

NITTA HAAS INC

1 patent

US10344187B2Jul 9, 2019

Polishing composition and polishing method using the same

NITTA HAAS INC0 citations49