P

Inventor

MIKURIYA SHUNSUKE

JP7 patents
⚠️ This page may combine multiple inventors who share the name “MIKURIYA SHUNSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMCO CORP

4 patents
US11772231B2Oct 3, 2023

Double-sided wafer polishing method

SUMCO CORP0 citations60
US11127584B2Sep 21, 2021

Method of producing carrier and method of polishing wafer

SUMCO CORP0 citations60
US11170988B2Nov 9, 2021

Method of double-side polishing silicon wafer

SUMCO CORP0 citations48
US12568784B2Mar 3, 2026

Method of polishing carrier plate, carrier plate, and method of polishing semiconductor wafer

SUMCO CORP0 citations39

OGATA SHINICHI

2 patents
US8932952B2Jan 13, 2015

Method for polishing silicon wafer and polishing liquid therefor

OGATA SHINICHI6 citations68
US8728942B2May 20, 2014

Method for producing epitaxial silicon wafer

OGATA SHINICHI3 citations57

TAKAISHI KAZUSHIGE

1 patent
US8900033B2Dec 2, 2014

Wafer polishing method

TAKAISHI KAZUSHIGE3 citations52