Inventor
NAKANO HISAJIRO
JP14 patents
Patents
14 patentsUS10741423B2Aug 11, 2020
Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate
EBARA CORP9 citations83
US10096492B2Oct 9, 2018
Substrate cleaning apparatus and polishing apparatus
EBARA CORP2 citations71
US10991602B2Apr 27, 2021
Substrate washing device
EBARA CORP1 citations62
US9472441B2Oct 18, 2016
Substrate processing apparatus
EBARA CORP2 citations62
US11532491B2Dec 20, 2022
Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate
EBARA CORP0 citations61
US11180303B2Nov 23, 2021
Storage container of scrubbing member and package of same
EBARA CORP0 citations61
US11094548B2Aug 17, 2021
Apparatus for cleaning substrate and substrate cleaning method
EBARA CORP1 citations61
US12532694B2Jan 20, 2026
Substrate cleaning device and substrate processing device
EBARA CORP0 citations60
US11664252B2May 30, 2023
Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device
EBARA CORP0 citations59
US11626299B2Apr 11, 2023
Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus
EBARA CORP0 citations56
US10361101B2Jul 23, 2019
Substrate cleaning apparatus and substrate processing apparatus X
EBARA CORP1 citations56
US11948827B2Apr 2, 2024
Substrate support mechanism, substrate cleaning device and substrate processing method
EBARA CORP0 citations51
US11495475B2Nov 8, 2022
Method of cleaning a substrate
EBARA CORP0 citations50
US11311918B2Apr 26, 2022
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations50