Inventor
NORO Motoki
JP4 patents
Patents
4 patentsUS9165764B2Oct 20, 2015
Plasma treatment method and plasma treatment device
TOKYO ELECTRON LTD3 citations60
US11881410B2Jan 23, 2024
Substrate processing apparatus and plasma processing apparatus
TOKYO ELECTRON LTD0 citations53
US11201063B2Dec 14, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations53
US8946030B2Feb 3, 2015
Method for forming dummy gate
TOKYO ELECTRON LTD0 citations31