Inventor
KINO SHU
JP3 patents
Patents
3 patentsUS12347645B2Jul 1, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11881410B2Jan 23, 2024
Substrate processing apparatus and plasma processing apparatus
TOKYO ELECTRON LTD0 citations53
US11201063B2Dec 14, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations53